Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10403515 | Loadlock integrated bevel etcher system | Saptarshi Basu, Paul Connors, Dale R. Du Bois, Prashant Kumar Kulshreshtha, Karthik Thimmavajjula Narasimha +12 more | 2019-09-03 |
| 10281261 | In-situ metrology method for thickness measurement during PECVD processes | Khokan Chandra Paul, Edward W. Budiarto, Todd Egan, Mehdi Vaez-Iravani, Dale R. Du Bois +1 more | 2019-05-07 |
| 10276364 | Bevel etch profile control | Zonghui SU, Vinay Prabhakar, Abdul Aziz Khaja | 2019-04-30 |
| 10269594 | Transparent plate and substrate processing system therewith | Nam Hoon Lee, JungWoo Seo, Joonghan Shin, Byung Joo Oh, Gi-Nam Park +1 more | 2019-04-23 |