Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10446430 | Patterned chuck for substrate processing | Terry Bluck, Babak Adibi, William Eugene Runstadler, Jr. | 2019-10-15 |
| 10276364 | Bevel etch profile control | Zonghui SU, Abdul Aziz Khaja, Jeongmin Lee | 2019-04-30 |