Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10276364 | Bevel etch profile control | Zonghui SU, Vinay Prabhakar, Jeongmin Lee | 2019-04-30 |
| 10266943 | Plasma corrosion resistive heater for high temperature processing | Ren-Guan Duan, Amit Kumar BANSAL, Jianhua Zhou, Juan Carlos Rocha-Alvarez | 2019-04-23 |
| 10192717 | Conditioning remote plasma source for enhanced performance having repeatable etch and deposition rates | Mohamad A. Ayoub, Jay D. Pinson, II, Juan Carlos Rocha-Alvarez | 2019-01-29 |