Issued Patents 2019
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10483102 | Surface modification to improve amorphous silicon gapfill | Shishi Jiang, Abhijit Basu Mallick | 2019-11-19 |
| 10460933 | Two-step process for gapfilling high aspect ratio trenches with amorphous silicon film | Shishi Jiang, Rui Cheng, Abhijit Basu Mallick | 2019-10-29 |
| 10373823 | Deployment of light energy within specific spectral bands in specific sequences for deposition, treatment and removal of materials | Swaminathan Srinivasan, Atashi Basu, Khokan Chandra Paul, Diwakar Kedlaya | 2019-08-06 |
| 10347488 | Titanium compound based hard mask films | Rui Cheng, Wei V. Tang, Abhijit Basu Mallick, Srinivas Gandikota | 2019-07-09 |
| 10319624 | Oxidative volumetric expansion of metals and metal containing compounds | Susmit Singha Roy, Yihong Chen, Kelvin Chan, Abhijit Basu Mallick, Srinivas Gandikota | 2019-06-11 |
| 10312137 | Hardmask layer for 3D NAND staircase structure in semiconductor applications | Eswaranand Venkatasubramanian, Susmit Singha Roy, Abhijit Basu Mallick | 2019-06-04 |
| 10280507 | Flowable gapfill using solvents | Ranga Rao Arnepalli, Darshan Thakare, Abhijit Basu Mallick, Robert Jan Visser, Prerna Goradia +1 more | 2019-05-07 |
| 10192775 | Methods for gapfill in high aspect ratio structures | Ludovic Godet, Rui Cheng, Erica Chen, Ziqing Duan, Abhijit Basu Mallick +1 more | 2019-01-29 |
| 10176980 | Selective deposition of silicon oxide films | Abhijit Basu Mallick | 2019-01-08 |