| 10483102 |
Surface modification to improve amorphous silicon gapfill |
Shishi Jiang, Abhijit Basu Mallick |
2019-11-19 |
| 10460933 |
Two-step process for gapfilling high aspect ratio trenches with amorphous silicon film |
Shishi Jiang, Rui Cheng, Abhijit Basu Mallick |
2019-10-29 |
| 10373823 |
Deployment of light energy within specific spectral bands in specific sequences for deposition, treatment and removal of materials |
Swaminathan Srinivasan, Atashi Basu, Khokan Chandra Paul, Diwakar Kedlaya |
2019-08-06 |
| 10347488 |
Titanium compound based hard mask films |
Rui Cheng, Wei V. Tang, Abhijit Basu Mallick, Srinivas Gandikota |
2019-07-09 |
| 10319624 |
Oxidative volumetric expansion of metals and metal containing compounds |
Susmit Singha Roy, Yihong Chen, Kelvin Chan, Abhijit Basu Mallick, Srinivas Gandikota |
2019-06-11 |
| 10312137 |
Hardmask layer for 3D NAND staircase structure in semiconductor applications |
Eswaranand Venkatasubramanian, Susmit Singha Roy, Abhijit Basu Mallick |
2019-06-04 |
| 10280507 |
Flowable gapfill using solvents |
Ranga Rao Arnepalli, Darshan Thakare, Abhijit Basu Mallick, Robert Jan Visser, Prerna Goradia +1 more |
2019-05-07 |
| 10192775 |
Methods for gapfill in high aspect ratio structures |
Ludovic Godet, Rui Cheng, Erica Chen, Ziqing Duan, Abhijit Basu Mallick +1 more |
2019-01-29 |
| 10176980 |
Selective deposition of silicon oxide films |
Abhijit Basu Mallick |
2019-01-08 |
