| 10490411 |
Method for enabling self-aligned lithography on metal contacts and selective deposition using free-standing vertical carbon structures |
Kurtis Leschkies, Steven Verhaverbeke, Abhijit Basu Mallick |
2019-11-26 |
| 10418243 |
Ultra-high modulus and etch selectivity boron-carbon hardmask films |
Prashant Kumar Kulshreshtha, Karthik Thimmavajjula Narasimha, Kwangduk Douglas Lee, Bok Hoen Kim |
2019-09-17 |
| 10410872 |
Borane mediated dehydrogenation process from silane and alkylsilane species for spacer and hardmask application |
Rui Cheng, Milind Gadre, Praket P. Jha, Abhijit Basu Mallick, Deenesh Padhi |
2019-09-10 |
| 10410865 |
Methods of forming self-aligned vias |
David Thompson, Benjamin Schmiege, Jeffrey W. Anthis, Abhijit Basu Mallick, Susmit Singha Roy +3 more |
2019-09-10 |
| 10403542 |
Methods of forming self-aligned vias and air gaps |
Susmit Singha Roy, Abhijit Basu Mallick, Praburam Gopalraja |
2019-09-03 |
| 10373822 |
Gas flow profile modulated control of overlay in plasma CVD films |
Prashant Kumar Kulshreshtha, Sudha Rathi, Praket P. Jha, Saptarshi Basu, Kwangduk Douglas Lee +5 more |
2019-08-06 |
| 10354916 |
Methods for wordline separation in 3D-NAND devices |
Yihong Chen, Abhijit Basu Mallick, Kelvin Chan |
2019-07-16 |
| 10319636 |
Deposition and treatment of films for patterning |
Atashi Basu, Abhijit Basu Mallick, Srinivas Gandikota |
2019-06-11 |
| 10319604 |
Methods for self-aligned patterning |
Yihong Chen, Abhijit Basu Mallick, Srinivas Gandikota |
2019-06-11 |
| 10319591 |
Geometric control of bottom-up pillars for patterning applications |
Abhijit Basu Mallick |
2019-06-11 |
| 10192775 |
Methods for gapfill in high aspect ratio structures |
Pramit Manna, Ludovic Godet, Rui Cheng, Erica Chen, Abhijit Basu Mallick +1 more |
2019-01-29 |
