Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10465294 | Oxide and metal removal | Xikun Wang, Jie Liu, Anchuan Wang, Nitin K. Ingle, Jeffrey W. Anthis | 2019-11-05 |
| 10410865 | Methods of forming self-aligned vias | David Thompson, Jeffrey W. Anthis, Abhijit Basu Mallick, Susmit Singha Roy, Ziqing Duan +3 more | 2019-09-10 |
| 10323054 | Precursors for deposition of metal, metal nitride and metal oxide based films of transition metals | Jeffrey W. Anthis, David Thompson | 2019-06-18 |
| 10297462 | Methods of etching films comprising transition metals | Jeffrey W. Anthis, David Thompson | 2019-05-21 |
| 10242885 | Selective dry etching of metal films comprising multiple metal oxides | Jeffrey W. Anthis, David Thompson | 2019-03-26 |
| 10233547 | Methods of etching films with reduced surface roughness | Nitin K. Ingle, Srinivas D. Nemani, Jeffrey W. Anthis, Xikun Wang, Jie Liu +1 more | 2019-03-19 |