Issued Patents 2019
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10497579 | Water-free etching methods | Zhijun Chen, Lin Xu, Nitin K. Ingle | 2019-12-03 |
| 10468267 | Water-free etching methods | Zhijun Chen, Lin Xu, Nitin K. Ingle | 2019-11-05 |
| 10465294 | Oxide and metal removal | Xikun Wang, Jie Liu, Nitin K. Ingle, Jeffrey W. Anthis, Benjamin Schmiege | 2019-11-05 |
| 10424463 | Oxide etch selectivity systems and methods | Lin Xu, Zhijun Chen, Son T. Nguyen | 2019-09-24 |
| 10424464 | Oxide etch selectivity systems and methods | Lin Xu, Zhijun Chen, Son T. Nguyen | 2019-09-24 |
| 10319600 | Thermal silicon etch | Zihui Li, Rui Cheng, Nitin K. Ingle, Abhijit Basu Mallick | 2019-06-11 |
| 10319603 | Selective SiN lateral recess | Zhijun Chen, Jiayin Huang, Nitin K. Ingle | 2019-06-11 |
| 10283324 | Oxygen treatment for nitride etching | Zhijun Chen, Jiayin Huang | 2019-05-07 |
| 10249507 | Methods for selective etching of a silicon material | Zihui Li, Xing-Fu Zhong, Nitin K. Ingle | 2019-04-02 |
| 10204796 | Methods for selective etching of a silicon material using HF gas without nitrogen etchants | Nitin K. Ingle, Zihui Li, Mikhail Korolik | 2019-02-12 |
| 10204795 | Flow distribution plate for surface fluorine reduction | Jiayin Huang, Lin Xu, Zhijun Chen | 2019-02-12 |
| 10186428 | Removal methods for high aspect ratio structures | Lin Xu, Zhijun Chen, Jiayin Huang | 2019-01-22 |
| 10170336 | Methods for anisotropic control of selective silicon removal | Zihui Li, Chia-Ling Kao, Nitin K. Ingle | 2019-01-01 |