Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490418 | Systems and methods for internal surface conditioning assessment in plasma processing equipment | Soonam Park, Yufei Zhu, Edwin C. Suarez, Nitin K. Ingle, Dmitry Lubomirsky | 2019-11-26 |
| 10319603 | Selective SiN lateral recess | Zhijun Chen, Anchuan Wang, Nitin K. Ingle | 2019-06-11 |
| 10283324 | Oxygen treatment for nitride etching | Zhijun Chen, Anchuan Wang | 2019-05-07 |
| 10204795 | Flow distribution plate for surface fluorine reduction | Lin Xu, Zhijun Chen, Anchuan Wang | 2019-02-12 |
| 10186428 | Removal methods for high aspect ratio structures | Lin Xu, Zhijun Chen, Anchuan Wang | 2019-01-22 |