Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490418 | Systems and methods for internal surface conditioning assessment in plasma processing equipment | Soonam Park, Yufei Zhu, Nitin K. Ingle, Dmitry Lubomirsky, Jiayin Huang | 2019-11-26 |
| 10434623 | Local area polishing system and polishing pad assemblies for a polishing system | Eric Lau, Hui Chen, King Yi Heung, Wei-Cheng Lee, Chih Chung Chou +3 more | 2019-10-08 |