Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10434623 | Local area polishing system and polishing pad assemblies for a polishing system | Hui Chen, King Yi Heung, Wei-Cheng Lee, Chih Chung Chou, Edwin C. Suarez +3 more | 2019-10-08 |
| 10256111 | Chemical mechanical polishing automated recipe generation | King Yi Heung, Charles C. Garretson, Jun Qian, Thomas H. Osterheld, Shuchivrat Datar +1 more | 2019-04-09 |