Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10500694 | Chemical mechanical polishing apparatus and methods | Rajeev Bajaj, Hung Chih Chen, Terrance Y. Lee | 2019-12-10 |
| 10478937 | Acoustic emission monitoring and endpoint for chemical mechanical polishing | Jianshe Tang, David Masayuki Ishikawa, Benjamin Cherian, Jeonghoon Oh | 2019-11-19 |
| 10256111 | Chemical mechanical polishing automated recipe generation | Eric Lau, King Yi Heung, Charles C. Garretson, Jun Qian, Shuchivrat Datar +1 more | 2019-04-09 |