Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10478937 | Acoustic emission monitoring and endpoint for chemical mechanical polishing | Jianshe Tang, David Masayuki Ishikawa, Jeonghoon Oh, Thomas H. Osterheld | 2019-11-19 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10478937 | Acoustic emission monitoring and endpoint for chemical mechanical polishing | Jianshe Tang, David Masayuki Ishikawa, Jeonghoon Oh, Thomas H. Osterheld | 2019-11-19 |