Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10478937 | Acoustic emission monitoring and endpoint for chemical mechanical polishing | David Masayuki Ishikawa, Benjamin Cherian, Jeonghoon Oh, Thomas H. Osterheld | 2019-11-19 |
| 10350723 | Overpolishing based on electromagnetic inductive monitoring of trench depth | Shih-Haur Shen, Jimin Zhang, David Maxwell Gage | 2019-07-16 |
| 10256120 | Systems, methods and apparatus for post-chemical mechanical planarization substrate buff pre-cleaning | Clinton SAKATA, Hui Chen, Jim K. Atkinson, Brian J. Brown, Yufei Chen +1 more | 2019-04-09 |