Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10427272 | Endpoint detection with compensation for filtering | Kun Xu, Kevin Y. Lin, Ingemar Carlsson, Tzu-Yu Liu | 2019-10-01 |
| 10391610 | Core configuration for in-situ electromagnetic induction monitoring system | Hassan G. Iravani, Kun Xu, Denis Ivanov, Boguslaw A. Swedek | 2019-08-27 |
| 10350723 | Overpolishing based on electromagnetic inductive monitoring of trench depth | Jianshe Tang, Jimin Zhang, David Maxwell Gage | 2019-07-16 |
| 10207386 | Determination of gain for eddy current sensor | Kun Xu, Boguslaw A. Swedek, Ingemar Carlsson, Doyle E. Bennett, Wen-Chiang Tu +2 more | 2019-02-19 |