Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10391610 | Core configuration for in-situ electromagnetic induction monitoring system | Hassan G. Iravani, Kun Xu, Denis Ivanov, Shih-Haur Shen | 2019-08-27 |
| 10276460 | Endpointing detection for chemical mechanical polishing based on spectrometry | Dominic J. Benvegnu, Jeffrey Drue David | 2019-04-30 |
| 10207386 | Determination of gain for eddy current sensor | Kun Xu, Shih-Haur Shen, Ingemar Carlsson, Doyle E. Bennett, Wen-Chiang Tu +2 more | 2019-02-19 |
| 10199281 | Substrate features for inductive monitoring of conductive trench depth | Wei Lu, Zhihong Wang, Wen-Chiang Tu, Zhefu Wang, Hassan G. Iravani +2 more | 2019-02-05 |