Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10430719 | Process control techniques for semiconductor manufacturing processes | — | 2019-10-01 |
| 10276460 | Endpointing detection for chemical mechanical polishing based on spectrometry | Dominic J. Benvegnu, Boguslaw A. Swedek | 2019-04-30 |