Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10478937 | Acoustic emission monitoring and endpoint for chemical mechanical polishing | Jianshe Tang, Benjamin Cherian, Jeonghoon Oh, Thomas H. Osterheld | 2019-11-19 |
| 10252397 | Methods and apparatus for profile and surface preparation of retaining rings utilized in chemical mechanical polishing processes | Jeonghoon Oh, Garrett H. Sin, Charles C. Garretson, Huanbo Zhang, Chia-Ling PAI +2 more | 2019-04-09 |