Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490418 | Systems and methods for internal surface conditioning assessment in plasma processing equipment | Soonam Park, Edwin C. Suarez, Nitin K. Ingle, Dmitry Lubomirsky, Jiayin Huang | 2019-11-26 |