Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10431435 | Wafer carrier with independent isolated heater zones | Dmitry Lubomirsky, Anh N. Nguyen, David Palagashvill | 2019-10-01 |
| 10424463 | Oxide etch selectivity systems and methods | Lin Xu, Zhijun Chen, Anchuan Wang | 2019-09-24 |
| 10424464 | Oxide etch selectivity systems and methods | Lin Xu, Zhijun Chen, Anchuan Wang | 2019-09-24 |