Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10497573 | Selective atomic layer etching of semiconductor materials | Prerna Goradia, Fei Wang, Geetika Bajaj, Nitin K. Ingle, Robert Jan Visser +1 more | 2019-12-03 |
| 10319600 | Thermal silicon etch | Rui Cheng, Anchuan Wang, Nitin K. Ingle, Abhijit Basu Mallick | 2019-06-11 |
| 10249507 | Methods for selective etching of a silicon material | Xing-Fu Zhong, Anchuan Wang, Nitin K. Ingle | 2019-04-02 |
| 10204796 | Methods for selective etching of a silicon material using HF gas without nitrogen etchants | Nitin K. Ingle, Anchuan Wang, Mikhail Korolik | 2019-02-12 |
| 10170336 | Methods for anisotropic control of selective silicon removal | Chia-Ling Kao, Anchuan Wang, Nitin K. Ingle | 2019-01-01 |