Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10497573 | Selective atomic layer etching of semiconductor materials | Prerna Goradia, Fei Wang, Nitin K. Ingle, Zihui Li, Robert Jan Visser +1 more | 2019-12-03 |
| 10253406 | Method for forming yttrium oxide on semiconductor processing equipment | Laksheswar Kalita, Prerna Goradia, Yogita Pareek, Yixing Lin, Dmitry Lubomirsky +4 more | 2019-04-09 |
| 10233554 | Aluminum electroplating and oxide formation as barrier layer for aluminum semiconductor process equipment | Yogita Pareek, Laksheswar Kalita, Kevin A. PAPKE, Ankur Kadam, Bipin Thakur +3 more | 2019-03-19 |
| 10177002 | Methods for chemical etching of silicon | Ravindra Patil, Prerna Goradia, Robert Jan Visser | 2019-01-08 |