Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10253406 | Method for forming yttrium oxide on semiconductor processing equipment | Laksheswar Kalita, Prerna Goradia, Geetika Bajaj, Yogita Pareek, Yixing Lin +4 more | 2019-04-09 |
| 10233554 | Aluminum electroplating and oxide formation as barrier layer for aluminum semiconductor process equipment | Yogita Pareek, Laksheswar Kalita, Geetika Bajaj, Ankur Kadam, Bipin Thakur +3 more | 2019-03-19 |