Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10407789 | Uniform crack-free aluminum deposition by two step aluminum electroplating process | Balaji Ganapathy, Ankur Kadam, Prerna Goradia, Tapash Chakraborty, Vijay Bhan Sharma | 2019-09-10 |
| 10253406 | Method for forming yttrium oxide on semiconductor processing equipment | Prerna Goradia, Geetika Bajaj, Yogita Pareek, Yixing Lin, Dmitry Lubomirsky +4 more | 2019-04-09 |
| 10233554 | Aluminum electroplating and oxide formation as barrier layer for aluminum semiconductor process equipment | Yogita Pareek, Geetika Bajaj, Kevin A. PAPKE, Ankur Kadam, Bipin Thakur +3 more | 2019-03-19 |