Issued Patents 2019
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10483116 | Methods of depositing metal films using metal oxyhalide precursors | Xinyu Fu, David Knapp, David Thompson, Mei Chang | 2019-11-19 |
| 10465294 | Oxide and metal removal | Xikun Wang, Jie Liu, Anchuan Wang, Nitin K. Ingle, Benjamin Schmiege | 2019-11-05 |
| 10410865 | Methods of forming self-aligned vias | David Thompson, Benjamin Schmiege, Abhijit Basu Mallick, Susmit Singha Roy, Ziqing Duan +3 more | 2019-09-10 |
| 10364492 | Film deposition using precursors containing amidoimine ligands | David Thompson, Ravi Kanjolia, Shaun Garrett | 2019-07-30 |
| 10323054 | Precursors for deposition of metal, metal nitride and metal oxide based films of transition metals | Benjamin Schmiege, David Thompson | 2019-06-18 |
| 10315995 | Nitrogen-containing ligands and their use in atomic layer deposition methods | David Thompson | 2019-06-11 |
| 10297462 | Methods of etching films comprising transition metals | Benjamin Schmiege, David Thompson | 2019-05-21 |
| 10242885 | Selective dry etching of metal films comprising multiple metal oxides | David Thompson, Benjamin Schmiege | 2019-03-26 |
| 10233547 | Methods of etching films with reduced surface roughness | Benjamin Schmiege, Nitin K. Ingle, Srinivas D. Nemani, Xikun Wang, Jie Liu +1 more | 2019-03-19 |
| 10221481 | Metal complexes containing amidoimine ligands | Ravi Kanjolia, Shaun Garratt, David Thompson | 2019-03-05 |
| 10199215 | Apparatus and method for selective deposition | Abhishek Dube, Schubert S. Chu, Jessica S. Kachian, David Thompson | 2019-02-05 |