Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522375 | Monitoring system for deposition and method of operation thereof | Edward W. Budiarto, Majeed A. Foad, Thomas Nowak, Todd Egan, Mehdi Vaez-Iravani | 2019-12-31 |
| 10236198 | Methods for the continuous processing of substrates | Banqiu Wu, Nag B. Patibandla, Toshiaki Fujita, Pravin K. Narwankar, Jeonghoon Oh +2 more | 2019-03-19 |
| 10209613 | System and method for manufacturing planarized extreme ultraviolet lithography blank | Cara Beasley, Majeed A. Foad, Timothy Michaelson | 2019-02-19 |
| 10197907 | Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor | Vinayak Vishwanath Hassan, Majeed A. Foad, Cara Beasley | 2019-02-05 |
| 10199660 | Shadow mask alignment and management system | Byung Sung Kwak, Stefan Bangert, Michael Koenig | 2019-02-05 |