Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10197907 | Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor | Majeed A. Foad, Cara Beasley, Ralf Hofmann | 2019-02-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10197907 | Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor | Majeed A. Foad, Cara Beasley, Ralf Hofmann | 2019-02-05 |