Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10494736 | Device to increase deposition uniformity in spatial ALD processing chamber | Joseph Yudovsky | 2019-12-03 |
| 10415137 | Non-metallic thermal CVD/ALD Gas Injector and Purge Systems | Joseph Yudovsky | 2019-09-17 |