| 10446710 |
Transfer chamber and method of using a transfer chamber |
Aaron P. Webb, Charles T. Carlson, Paul Forderhase, Robert Brent Vopat |
2019-10-15 |
| 10443934 |
Substrate handling and heating system |
Morgan Evans, Jason M. Schaller, D. Jeffrey Lischer, Ala Moradian, Robert Brent Vopat |
2019-10-15 |
| 10427303 |
Substrate deposition systems, robot transfer apparatus, and methods for electronic device manufacturing |
Malcolm N. Daniel, JR., Robert Brent Vopat, Jason M. Schaller, Jacob Newman, Dinesh Kanawade +4 more |
2019-10-01 |
| 10361104 |
Ambient controlled transfer module and process system |
Shay Assaf, Andrew J. Constant, Jacob Newman, Charles T. Carlson, Stephen C. Hickerson |
2019-07-23 |
| 10283379 |
Batch LED heating and cooling chamber or loadlock |
Jason M. Schaller, Robert Brent Vopat, Paul E. Pergande, Benjamin B. Riordon, David Blahnik |
2019-05-07 |
| 10256125 |
Wafer processing systems including multi-position batch load lock apparatus with temperature control capability |
Joseph Yudovsky, Jason M. Schaller, Jeffrey Blahnik, Robert Brent Vopat, Malcolm N. Daniel, JR. +1 more |
2019-04-09 |
| 10249525 |
Dynamic leveling process heater lift |
Jason M. Schaller, Michael Paul Rohrer, Tuan Nguyen, Gregory John Freeman, Robert Brent Vopat |
2019-04-02 |
| 10186449 |
Apparatus and methods for wafer rotation to improve spatial ALD process uniformity |
Joseph Yudovsky, Jeffrey Blahnik |
2019-01-22 |
