Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10256125 | Wafer processing systems including multi-position batch load lock apparatus with temperature control capability | William T. Weaver, Joseph Yudovsky, Jason M. Schaller, Robert Brent Vopat, Malcolm N. Daniel, JR. +1 more | 2019-04-09 |
| 10256132 | Reticle processing system | James D. Strassner, Charles T. Carlson, Robert Brent Vopat | 2019-04-09 |
| 10186449 | Apparatus and methods for wafer rotation to improve spatial ALD process uniformity | William T. Weaver, Joseph Yudovsky | 2019-01-22 |