Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10446418 | Symmetric chamber body design architecture to address variable process volume with improved flow uniformity/gas conductance | Andrew Nguyen, Tom K. Cho | 2019-10-15 |
| 10381200 | Plasma chamber with tandem processing regions | Andrew Nguyen, Xue Yang Chang | 2019-08-13 |
| 10211033 | Inline DPS chamber hardware are design to enable axis symmetry for improved flow conductance and uniformity | Andrew Nguyen, Tom K. Cho | 2019-02-19 |