Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504765 | Electrostatic chuck assembly having a dielectric filler | Kartik Ramaswamy, Anwar Husain, Haitao Wang, Evans Lee, Jaeyong Cho +3 more | 2019-12-10 |
| 10490429 | Substrate carrier using a proportional thermal fluid delivery system | Phillip Criminale, Justin Phi, Dan Marohl, Brad L. Mays | 2019-11-26 |
| 10468233 | RF power delivery regulation for processing substrates | Katsumasa Kawasaki, Justin Phi | 2019-11-05 |
| 10378108 | Showerhead with reduced backside plasma ignition | Haitao Wang, Hamid Noorbakhsh, Chunlei Zhang, Kartik Ramaswamy, Roland Smith +1 more | 2019-08-13 |
| 10242893 | Method and apparatus for de-chucking a workpiece using a swing voltage sequence | Haitao Wang, Wonseok Lee, Chunlei Zhang, Kartik Ramaswamy | 2019-03-26 |