Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10468233 | RF power delivery regulation for processing substrates | Justin Phi, Sergio Fukuda Shoji | 2019-11-05 |
| 10424467 | Smart RF pulsing tuning using variable frequency generators | — | 2019-09-24 |