Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 10440777 | Azimuthally tunable multi-zone electrostatic chuck | Chunlei Zhang, Phillip Criminale, Steven E. Babayan | 2019-10-08 | $26,143,000 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 10440777 | Azimuthally tunable multi-zone electrostatic chuck | Chunlei Zhang, Phillip Criminale, Steven E. Babayan | 2019-10-08 | $26,143,000 |