Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10440777 | Azimuthally tunable multi-zone electrostatic chuck | Chunlei Zhang, Phillip Criminale, Steven E. Babayan | 2019-10-08 |
DU
David Ullstrom
Overall (2019): #490,500 of 560,194Top 90%
1
Patents 2019