Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10460916 | Real time monitoring with closed loop chucking force control | Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Matthew J. Busche, Masanori Ono, Senh Thach | 2019-10-29 |
| 10403534 | Pixilated cooling, temperature controlled substrate support assembly | Vijay D. Parkhe, Wendell Glenn Boyd, Jr., Matthew J. Busche, Masanori Ono, Senh Thach | 2019-09-03 |
| 10304715 | Electrostatic chuck having thermally isolated zones with minimal crosstalk | Vijay D. Parkhe, Jason Della Rosa, Hamid Noorbakhsh, Brad L. Mays, Douglas A. Buchberger, Jr. | 2019-05-28 |