Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10520371 | Optical fiber temperature sensors, temperature monitoring apparatus, and manufacturing methods | — | 2019-12-31 |
| 10460916 | Real time monitoring with closed loop chucking force control | Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Konstantin Makhratchev, Masanori Ono, Senh Thach | 2019-10-29 |
| 10403534 | Pixilated cooling, temperature controlled substrate support assembly | Vijay D. Parkhe, Wendell Glenn Boyd, Jr., Konstantin Makhratchev, Masanori Ono, Senh Thach | 2019-09-03 |
| 10395964 | Apparatus and method for measurement of the thermal performance of an electrostatic wafer chuck | Vijay D. Parkhe, Michael R. Rice | 2019-08-27 |