Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10460916 | Real time monitoring with closed loop chucking force control | Vijay D. Parkhe, Matthew J. Busche, Konstantin Makhratchev, Masanori Ono, Senh Thach | 2019-10-29 |
| 10403534 | Pixilated cooling, temperature controlled substrate support assembly | Vijay D. Parkhe, Matthew J. Busche, Konstantin Makhratchev, Masanori Ono, Senh Thach | 2019-09-03 |