Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10460978 | Boltless substrate support assembly | Fangli Hao, Zhigang Chen | 2019-10-29 |
| 10262887 | Pin lifter assembly with small gap | Fangli Hao | 2019-04-16 |
| 10187965 | Plasma confinement apparatus, and method for confining a plasma | Tuqiang Ni, Jinyuan Chen, Qing Qian, Zhaoyang Xu, Xusheng Zhou +1 more | 2019-01-22 |