Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10475623 | Ceramic layer for electrostatic chuck including embedded faraday cage for RF delivery and associated methods | Neil Benjamin, Anthony J. Ricci | 2019-11-12 |
| 10192767 | Ceramic electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and control | Neil Benjamin, Anthony J. Ricci | 2019-01-29 |