Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10514598 | Vacuum-integrated hardmask processes and apparatus | Jeffrey Marks, George Andrew Antonelli, Richard A. Gottscho, Dennis M. Hausmann, Adrien LaVoie +3 more | 2019-12-24 |
| 10242848 | Carrier ring structure and chamber systems including the same | Eli Jeon, Nick Ray Linebarger, Jr., Alice Hollister, Rungthiwa Methaapanon | 2019-03-26 |
| 10242883 | High aspect ratio etch of oxide metal oxide metal stack | Joydeep Guha, Kaushik Chattopadhyay, Thomas W. Mountsier, Aaron Eppler, Thorsten Lill +2 more | 2019-03-26 |
| 10192759 | Image reversal with AHM gap fill for multiple patterning | Nader Shamma, Bart J. van Schravendijk, Chunhai Ji | 2019-01-29 |