Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10438807 | Low roughness EUV lithography | Richard Wise | 2019-10-08 |
| 10269566 | Etching substrates using ale and selective deposition | Samantha Tan, Jengyi Yu, Richard Wise, Yang Pan | 2019-04-23 |
| 10192742 | Soft landing nanolaminates for advanced patterning | Frank L. Pasquale, Shankar Swaminathan, Adrien LaVoie, Girish Dixit | 2019-01-29 |
| 10192759 | Image reversal with AHM gap fill for multiple patterning | Bart J. van Schravendijk, Sirish Reddy, Chunhai Ji | 2019-01-29 |