Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10515816 | Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch) | Keren Jacobs Kanarik, Jeffrey Marks, Harmeet Singh, Alexander Kabansky, Wenbing Yang +3 more | 2019-12-24 |
| 10374144 | Dry plasma etch method to pattern MRAM stack | Taeseung Kim, Wenbing Yang, Jeffrey Marks, Thorsten Lill | 2019-08-06 |
| 10304659 | Ale smoothness: in and outside semiconductor industry | Keren Jacobs Kanarik, Thorsten Lill, Meihua Shen, Yang Pan, Jeffrey Marks +1 more | 2019-05-28 |
| 10269566 | Etching substrates using ale and selective deposition | Jengyi Yu, Richard Wise, Nader Shamma, Yang Pan | 2019-04-23 |
| 10186426 | Integrating atomic scale processes: ALD (atomic layer deposition) and ale (atomic layer etch) | Keren Jacobs Kanarik, Jeffrey Marks, Harmeet Singh, Alexander Kabansky, Wenbing Yang +3 more | 2019-01-22 |