Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10515816 | Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch) | Jeffrey Marks, Harmeet Singh, Samantha Tan, Alexander Kabansky, Wenbing Yang +3 more | 2019-12-24 |
| 10304659 | Ale smoothness: in and outside semiconductor industry | Samantha Tan, Thorsten Lill, Meihua Shen, Yang Pan, Jeffrey Marks +1 more | 2019-05-28 |
| 10186426 | Integrating atomic scale processes: ALD (atomic layer deposition) and ale (atomic layer etch) | Jeffrey Marks, Harmeet Singh, Samantha Tan, Alexander Kabansky, Wenbing Yang +3 more | 2019-01-22 |