Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10438807 | Low roughness EUV lithography | Nader Shamma | 2019-10-08 |
| 10304659 | Ale smoothness: in and outside semiconductor industry | Keren Jacobs Kanarik, Samantha Tan, Thorsten Lill, Meihua Shen, Yang Pan +1 more | 2019-05-28 |
| 10269566 | Etching substrates using ale and selective deposition | Samantha Tan, Jengyi Yu, Nader Shamma, Yang Pan | 2019-04-23 |
| 10197908 | Photoresist design layout pattern proximity correction through fast edge placement error prediction via a physics-based etch profile modeling framework | Saravanapriyan Sriraman, Harmeet Singh, Alex Paterson, Andrew D. Bailey, III, Vahid Vahedi +1 more | 2019-02-05 |