Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522354 | Antimony co-doping with phosphorus to form ultrashallow junctions using atomic layer deposition and annealing | Edmund Burte, Bodo Kalkofen | 2019-12-31 |
| 10431462 | Plasma assisted doping on germanium | Hyuk-Jun Kwon | 2019-10-01 |
| 10224212 | Isotropic etching of film with atomic layer control | Hyuk-Jun Kwon, Dong Woo Paeng, He Zhang | 2019-03-05 |
| 10217610 | Arrangements for manipulating plasma confinement within a plasma processing system and methods thereof | Eller Y. Juco, Neungho Shin, Andrew D. Bailey, III | 2019-02-26 |