Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10431462 | Plasma assisted doping on germanium | Yunsang Kim | 2019-10-01 |
| 10224212 | Isotropic etching of film with atomic layer control | Yunsang Kim, Dong Woo Paeng, He Zhang | 2019-03-05 |