HZ

He Zhang

Lam Research: 1 patents #175 of 444Top 40%
Overall (2019): #447,033 of 560,194Top 80%
1
Patents 2019

Issued Patents 2019

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10224212 Isotropic etching of film with atomic layer control Yunsang Kim, Hyuk-Jun Kwon, Dong Woo Paeng 2019-03-05