Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10224212 | Isotropic etching of film with atomic layer control | Yunsang Kim, Hyuk-Jun Kwon, Dong Woo Paeng | 2019-03-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10224212 | Isotropic etching of film with atomic layer control | Yunsang Kim, Hyuk-Jun Kwon, Dong Woo Paeng | 2019-03-05 |