BK

Bodo Kalkofen

Lam Research: 1 patents #175 of 444Top 40%
📍 Tangerhütte, DE: #1 of 1 inventorsTop 100%
Overall (2019): #527,199 of 560,194Top 95%
1
Patents 2019

Issued Patents 2019

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10522354 Antimony co-doping with phosphorus to form ultrashallow junctions using atomic layer deposition and annealing Yunsang Kim, Edmund Burte 2019-12-31