Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522354 | Antimony co-doping with phosphorus to form ultrashallow junctions using atomic layer deposition and annealing | Yunsang Kim, Edmund Burte | 2019-12-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522354 | Antimony co-doping with phosphorus to form ultrashallow junctions using atomic layer deposition and annealing | Yunsang Kim, Edmund Burte | 2019-12-31 |