EB

Edmund Burte

Lam Research: 1 patents #175 of 444Top 40%
📍 Neudrossenfeld, DE: #1 of 2 inventorsTop 50%
Overall (2019): #480,145 of 560,194Top 90%
1
Patents 2019

Issued Patents 2019

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10522354 Antimony co-doping with phosphorus to form ultrashallow junctions using atomic layer deposition and annealing Yunsang Kim, Bodo Kalkofen 2019-12-31