Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504704 | Plasma etching systems and methods using empirical mode decomposition | Luc Albarede, Jorge Luque, Andrew D. Bailey, III | 2019-12-10 |
| 10302553 | Gas exhaust by-product measurement system | Cristian Siladie, Luc Albarede, Edward J. McInerney, Sassan Roham | 2019-05-28 |
| 10242849 | System and method for detecting a process point in multi-mode pulse processes | Jorge Luque, Andrew D. Bailey, III, Mehmet Derya Tetiker, Ramkumar Subramanian, Yoko Yamaguchi | 2019-03-26 |