Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10386821 | Systems and methods for calibrating scalar field contribution values for a limited number of sensors including a temperature value of an electrostatic chuck and estimating temperature distribution profiles based on calibrated values | Andrew D. Bailey, III | 2019-08-20 |
| 10312121 | Systems and methods for aligning measurement device in substrate processing systems | Andrew D. Bailey, III, Dmitry Opaits | 2019-06-04 |